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化学气相沉积法在镍基衬底上合成石墨烯的电学特性研究

Electrical characterization of graphene synthesized by chemical vapor deposition using Ni substrate.

机构信息

Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

出版信息

Nanotechnology. 2012 Jan 13;23(1):015701. doi: 10.1088/0957-4484/23/1/015701.

Abstract

In this work, the electrical characterization of graphene films grown by chemical vapor deposition (CVD) on a Ni thin film is carried out and a simple relation between the gate-dependent electrical transport and the thickness of the films is presented. Arrays of two-terminal devices with an average graphene film thickness of 6.9 nm were obtained using standard fabrication techniques. A simple two-band model is used to describe the graphene films, with a band overlap parameter E(0) = 17 meV determined by the dependence of conductivity on temperature. Statistical electrical measurement data are presented for 126 devices, with an extracted average background conductivity σ = 0.91 mS, average carrier mobility μ = 1300 cm(2) V(-1) s(-1) and residual resistivity ρ = 1.65 kΩ. The ratio of mobility to conductivity is calculated to be inversely proportional to the graphene film thickness and this calculation is statistically verified for the ensemble of 126 devices. This result is a new method of graphene film thickness determination and is useful for films which cannot have their thickness measured by AFM or optical interference, but which are electrically contacted and gated. This general approach provides a framework for comparing graphene devices made using different fabrication methods and graphene growth techniques, even without prior knowledge of their uniformity or thickness.

摘要

本工作对化学气相沉积(CVD)在镍薄膜上生长的石墨烯薄膜进行了电学特性研究,并提出了栅极依赖的输运与薄膜厚度之间的简单关系。采用标准的制作技术,获得了具有平均石墨烯薄膜厚度为 6.9nm 的两端器件阵列。采用简单的双带模型来描述石墨烯薄膜,其中电导随温度的变化确定了带隙重叠参数 E(0) = 17 meV。给出了 126 个器件的统计电学测量数据,提取的平均背景电导率 σ = 0.91 mS,平均载流子迁移率 μ = 1300 cm(2) V(-1) s(-1)和残余电阻率 ρ = 1.65 kΩ。迁移率与电导率的比值被计算为与石墨烯薄膜厚度成反比,并且该计算在 126 个器件的集合中得到了统计验证。这是一种确定石墨烯薄膜厚度的新方法,对于不能通过原子力显微镜或光学干涉测量厚度的薄膜,但可以进行电接触和栅极控制的薄膜,这种方法非常有用。这种通用方法为使用不同的制造方法和石墨烯生长技术制造的石墨烯器件提供了一个比较框架,即使不知道其均匀性或厚度也可以进行比较。

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