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基于数字多功能光盘光学头的像散原子力显微镜系统的抗漂移和自动对准机制

Anti-drift and auto-alignment mechanism for an astigmatic atomic force microscope system based on a digital versatile disk optical head.

作者信息

Hwu E-T, Illers H, Wang W-M, Hwang I-S, Jusko L, Danzebrink H-U

机构信息

Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany.

出版信息

Rev Sci Instrum. 2012 Jan;83(1):013703. doi: 10.1063/1.3673001.

Abstract

In this work, an anti-drift and auto-alignment mechanism is applied to an astigmatic detection system (ADS)-based atomic force microscope (AFM) for drift compensation and cantilever alignment. The optical path of the ADS adopts a commercial digital versatile disc (DVD) optical head using the astigmatic focus error signal. The ADS-based astigmatic AFM is lightweight, compact size, low priced, and easy to use. Furthermore, the optical head is capable of measuring sub-atomic displacements of high-frequency AFM probes with a sub-micron laser spot (~570 nm, FWHM) and a high-working bandwidth (80 MHz). Nevertheless, conventional DVD optical heads suffer from signal drift problems. In a previous setup, signal drifts of even thousands of nanometers had been measured. With the anti-drift and auto-alignment mechanism, the signal drift is compensated by actuating a voice coil motor of the DVD optical head. A nearly zero signal drift was achieved. Additional benefits of this mechanism are automatic cantilever alignment and simplified design.

摘要

在这项工作中,一种抗漂移和自动对准机制被应用于基于像散检测系统(ADS)的原子力显微镜(AFM),用于漂移补偿和悬臂对准。ADS的光路采用了一个使用像散聚焦误差信号的商用数字多功能光盘(DVD)光学头。基于ADS的像散原子力显微镜重量轻、尺寸紧凑、价格低廉且易于使用。此外,该光学头能够通过一个亚微米激光光斑(~570纳米,半高宽)和高工作带宽(80兆赫兹)来测量高频AFM探针的亚原子位移。然而,传统的DVD光学头存在信号漂移问题。在之前的设置中,甚至测量到了数千纳米的信号漂移。通过抗漂移和自动对准机制,通过驱动DVD光学头的音圈电机来补偿信号漂移。实现了几乎为零的信号漂移。该机制的额外好处是自动悬臂对准和简化设计。

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