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采用边缘转印技术制造超精细纳米结构。

Fabrication of ultra-fine nanostructures using edge transfer printing.

机构信息

Department of Chemistry, Renmin University of China, Beijing, 100872, China.

出版信息

Nanoscale. 2012 Mar 21;4(6):1939-47. doi: 10.1039/c2nr11829g. Epub 2012 Feb 16.

DOI:10.1039/c2nr11829g
PMID:22344574
Abstract

The exploration of new methods and techniques for application in diverse fields, such as photonics, microfluidics, biotechnology and flexible electronics is of increasing scientific and technical interest for multiple uses over distance of 10-100 nm. This article discusses edge transfer printing--a series of unconventional methods derived from soft lithography for nanofabrication. It possesses the advantages of easy fabrication, low-cost and great serviceability. In this paper, we show how to produce exposed edges and use various materials for edge transfer printing, while nanoskiving, nanotransfer edge printing and tunable cracking for nanogaps are introduced. Besides this, different functional materials, such as metals, inorganic semiconductors and polymers, as well as localised heating and charge patterning, are described here as unconventional "inks" for printing. Edge transfer printing, which can effectively produce sub-100 nm scale ultra-fine structures, has broad applications, including metallic nanowires as nanoelectrodes, semiconductor nanowires for chemical sensors, heterostructures of organic semiconductors, plasmonic devices and so forth.

摘要

探索新方法和技术在不同领域的应用,如光子学、微流控、生物技术和柔性电子学,对于在 10-100nm 距离上的多种用途具有越来越大的科学和技术兴趣。本文讨论了边缘转移印刷——一系列源自软光刻的用于纳米制造的非常规方法。它具有易于制造、低成本和高适用性的优点。在本文中,我们展示了如何制作暴露的边缘并使用各种材料进行边缘转移印刷,同时介绍了纳米刻划、纳米转移边缘印刷和纳米间隙的可调裂纹。除此之外,还描述了不同的功能材料,如金属、无机半导体和聚合物,以及局部加热和电荷图案化,作为非常规的“墨水”用于印刷。边缘转移印刷可以有效地产生亚 100nm 尺度的超精细结构,具有广泛的应用,包括作为纳米电极的金属纳米线、用于化学传感器的半导体纳米线、有机半导体的异质结构、等离子体器件等。

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