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基于周期性铝结构的 ST 切石英表面声波氨气传感器。

Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure.

机构信息

Department of Electrical Engineering, I- Shou University, Kaohsiung County, 84001, Taiwan.

出版信息

Sensors (Basel). 2009;9(2):980-94. doi: 10.3390/s90200980. Epub 2009 Feb 16.

DOI:10.3390/s90200980
PMID:22399951
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3280843/
Abstract

Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-port resonator with an Al grating on ST-cut quartz. The measured frequency responses of the resonator were similar to the simulation ones. Then, the chemical interface of polyaniline/WO(3) composites was coated on the SAW sensor for ammonia detection. The SAW sensor responded to ammonia gas and could be regenerated using dry nitrogen.

摘要

声表面波（SAW）器件是传感应用的关键组件。本工作研究了周期性光栅下的 SAW 传播。这里使用的理论方法是空间谐波法。我们还将本工作中研究的 SAW 传播结果应用于设计具有 ST 切石英上的 Al 光栅的两端口谐振器。谐振器的测量频率响应与模拟结果相似。然后，将聚苯胺/WO(3)复合材料的化学界面涂覆在 SAW 传感器上，用于检测氨气。SAW 传感器对氨气有响应，并且可以使用干燥氮气进行再生。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/8fd6df4d4093/sensors-09-00980f10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/19c2d240f577/sensors-09-00980f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/1da12e12eb62/sensors-09-00980f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/90a022e77487/sensors-09-00980f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/68e899f8d4b5/sensors-09-00980f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/3167d7e78a14/sensors-09-00980f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/a945e3ef3273/sensors-09-00980f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/06dd5275c14f/sensors-09-00980f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/542ef718e25e/sensors-09-00980f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/8bbe78ba3ff4/sensors-09-00980f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/8fd6df4d4093/sensors-09-00980f10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/19c2d240f577/sensors-09-00980f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/1da12e12eb62/sensors-09-00980f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/90a022e77487/sensors-09-00980f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/68e899f8d4b5/sensors-09-00980f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/3167d7e78a14/sensors-09-00980f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/a945e3ef3273/sensors-09-00980f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/06dd5275c14f/sensors-09-00980f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/542ef718e25e/sensors-09-00980f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/8bbe78ba3ff4/sensors-09-00980f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8e4f/3280843/8fd6df4d4093/sensors-09-00980f10.jpg

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