Department of Electronic Engineering, National Formosa University, Yunlin 632, Taiwan.
Ultrasonics. 2012 Aug;52(6):747-52. doi: 10.1016/j.ultras.2012.02.001. Epub 2012 Feb 15.
A ZnO guiding layer with nanorod arrays grown on a 90°-rotated ST-cut (42°45) quartz substrate was used to fabricate a Love wave fluid sensor. ZnO nanorod arrays synthesized on the guiding layer enhance the sensitivity of the flow rate. ZnO thin films were deposited by radio frequency magnetron sputtering and ZnO nanorod arrays were then synthesized on the thin films via the hydrothermal method. The crystalline structure and surface morphology of ZnO thin films and nanorod arrays were examined by X-ray diffraction and scanning electron microscopy. The effects of the thickness of ZnO thin film and the surface morphology of ZnO nanorod arrays on the sensitivity of flow rate were investigated. A linear response between flow rate and the return loss of the sensor with one-port resonator type can be obtained by adjusting the thickness of ZnO thin film and the length of nanorod arrays.
在一个 90°旋转的 ST 切石英（42°45）衬底上生长有纳米棒阵列的 ZnO 引导层被用于制造声表面波（Love wave）流体传感器。在引导层上合成的 ZnO 纳米棒阵列增强了流速的灵敏度。通过射频磁控溅射沉积 ZnO 薄膜，然后通过水热法在薄膜上合成 ZnO 纳米棒阵列。通过 X 射线衍射和扫描电子显微镜检查 ZnO 薄膜和纳米棒阵列的晶体结构和表面形貌。研究了 ZnO 薄膜的厚度和 ZnO 纳米棒阵列的表面形貌对流速灵敏度的影响。通过调整 ZnO 薄膜的厚度和纳米棒阵列的长度，可以获得具有单端口谐振器型的传感器的流速与回波损耗之间的线性响应。
