Drevniok B, Paul W M P, Hairsine K R, McLean A B
Department of Physics, Engineering Physics, and Astronomy, Queen's University, Kingston, Ontario K7L 3N6, Canada.
Rev Sci Instrum. 2012 Mar;83(3):033706. doi: 10.1063/1.3694972.
Because of their compact form factor and rigidity, piezoelectric motors are used in scanning probe microscopes that operate at low temperature and high magnetic field. Here we present detailed information to facilitate the assembly, operation, and characterization of inertial motors. Specifically, a model of the motor is developed and used to identify different regions of operation. Drive electronics with high slew rate and large output current are described and a step-by-step procedure for assembling piezoelectric shear stacks is detailed. Additionally, a novel reflective object sensor is described and used to characterize a Pan-style inertial motor that was designed and assembled using the concepts presented in this paper.
由于其紧凑的外形尺寸和刚性，压电电机被用于在低温和高磁场环境下运行的扫描探针显微镜中。在此，我们提供详细信息以促进惯性电机的组装、操作和特性表征。具体而言，开发了电机模型并用于识别不同的运行区域。描述了具有高转换速率和大输出电流的驱动电子设备，并详细介绍了组装压电剪切堆栈的分步程序。此外，还描述了一种新型反射物体传感器，并用于表征一款使用本文提出的概念设计和组装的盘式惯性电机。
