Wireless Semiconductor Division, AvagoTechnologies, San Jose, CA, USA.
IEEE Trans Ultrason Ferroelectr Freq Control. 2012 Mar;59(3):334-45. doi: 10.1109/TUFFC.2012.2202.
This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated. One technology differentiator is the size of the chip-scale packaged resonator. Another is that the silicon lid is perfectly suitable for placement of integrated circuits and this is currently being done. Many factors (wide tuning range, high Q, high frequency, small size, integrated circuitry) are being used to differentiate potential products for the time and frequency markets.
本文主要关注薄膜体声波谐振器（FBAR）技术在定时应用方面与其他机械谐振器技术的技术差异。本文将介绍 FBAR 的一个最新改进，即具有零漂移的谐振器（ZDR），它具有温度补偿功能。技术差异之一是芯片级封装谐振器的尺寸。另一个差异是硅盖非常适合集成电路的放置，目前正在这样做。许多因素（宽调谐范围、高 Q 值、高频率、小尺寸、集成电路）正被用于区分潜在的时间和频率市场产品。
