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基于36Y切割铌酸锂薄膜的无杂散水平剪切波谐振器

Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO Thin Film.

作者信息

Liu Yushuai, Liu Kangfu, Li Jiawei, Li Yang, Wu Tao

机构信息

School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.

Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

出版信息

Micromachines (Basel). 2024 Mar 30;15(4):477. doi: 10.3390/mi15040477.

DOI:10.3390/mi15040477
PMID:38675288
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11052185/
Abstract

This article presents lithium niobate (LiNbO) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Q) of 254 at the wave-propagating orientation of 0° in the 36Y-cut plane.

摘要

本文介绍了一种基于剪切水平（SH0）谐振器的铌酸锂（LiNbO），该谐振器采用悬浮结构，用于射频（RF）应用。文章展示了基于36Y切割LiNbO薄膜的SH0谐振器的设计、分析和制造。在36Y切割平面中，无杂散的SH0谐振器在0°波传播方向上实现了42.67%的机电耦合系数（kt2）和254的品质因数（Q）。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/ca28e7a65683/micromachines-15-00477-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/6c5e3bbd3669/micromachines-15-00477-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/db2791590112/micromachines-15-00477-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/c0d7033e8be0/micromachines-15-00477-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/181040fe58e5/micromachines-15-00477-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/457509ddb045/micromachines-15-00477-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/f49a7e81a8f5/micromachines-15-00477-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/1908883fc6ac/micromachines-15-00477-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/efd447abc7d3/micromachines-15-00477-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/a72ae3cf93b4/micromachines-15-00477-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/ca28e7a65683/micromachines-15-00477-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/6c5e3bbd3669/micromachines-15-00477-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/db2791590112/micromachines-15-00477-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/c0d7033e8be0/micromachines-15-00477-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/181040fe58e5/micromachines-15-00477-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/457509ddb045/micromachines-15-00477-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/f49a7e81a8f5/micromachines-15-00477-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/1908883fc6ac/micromachines-15-00477-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/efd447abc7d3/micromachines-15-00477-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/a72ae3cf93b4/micromachines-15-00477-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8fc/11052185/ca28e7a65683/micromachines-15-00477-g010.jpg

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本文引用的文献

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AlScN Lamb Wave Contour Mode Resonators.铝钪氮兰姆波轮廓模式谐振器
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Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators.铌酸锂A1谐振器中的横向杂散模式抑制
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GHz Broadband SH0 Mode Lithium Niobate Acoustic Delay Lines.吉赫兹宽带铌酸锂声学延迟线SH0模式
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