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非零位干涉仪中用于非球面测试的广义数据缩减方法。

Generalized data reduction approach for aspheric testing in a non-null interferometer.

作者信息

Tian Chao, Yang Yongying, Zhuo Yongmo

机构信息

State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, China.

出版信息

Appl Opt. 2012 Apr 1;51(10):1598-604. doi: 10.1364/AO.51.001598.

Abstract

Data reduction in non-null tests is difficult due to the presence of retrace error. We propose a simple yet effective data reduction approach for aspheric testing in a non-null interferometer. The new approach gives figure error of the aspheric by just subtracting the theoretical wavefront and first-order errors from the real wavefront obtained in the non-null interferometer. Precise prediction of the theoretical wavefront can be achieved by accurate calibration of the partial compensation system. The approach can be considered a generalization of the traditional data processing method in null tests, and errors that may affect its accuracy are discussed. A set of experiments have been carried out to demonstrate its validity and feasibility.

摘要

由于存在回程误差,非零位测试中的数据缩减很困难。我们提出了一种简单而有效的非零位干涉仪非球面测试数据缩减方法。新方法通过从非零位干涉仪获得的实际波前中减去理论波前和一阶误差来得到非球面的面形误差。通过对部分补偿系统进行精确校准,可以实现理论波前的精确预测。该方法可被视为传统零位测试数据处理方法的推广,并讨论了可能影响其精度的误差。已经进行了一组实验来证明其有效性和可行性。

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