Zhang Lei, Liu Dong, Shi Tu, Yang Yongying, Shen Yibing
Appl Opt. 2013 Dec 10;52(35):8501-11. doi: 10.1364/AO.52.008501.
Calibration for misalignment aberrations is one of the challenges in non-null interferometric aspheric testing. The high-order misalignment aberrations are especially difficult to distinguish from the rest of the testing system. The traditional calibration method removing the first four terms from the Zernike coefficients of the test wavefront is obviously inaccurate. Computer-aided alignment is considered to be an effective method; however, it is less practical due to its dependency on mechanical or manual adjustment, as are other common methods. A practical and accurate calibration method based on system modeling is proposed in this paper for misalignment aberrations' removal. In this work, actual misalignments, which are calculated from five selected low-order aberrations of the test wavefront in the experiment, are simulated in the model to predict all misalignment aberrations by ray tracing. These aberrations then are removed by a simple wavefront data subtraction. The method depends on neither a precise adjusting mechanism nor a troublesome manual adjustment. Experimental results showing feasibility and repeatability of the proposed method are presented.
失调像差的校准是非零位干涉非球面检测中的挑战之一。高阶失调像差尤其难以与检测系统的其他部分区分开来。从测试波前的泽尼克系数中去除前四项的传统校准方法显然不准确。计算机辅助对准被认为是一种有效的方法；然而，由于它依赖于机械或手动调整，与其他常见方法一样，它不太实用。本文提出了一种基于系统建模的实用且准确的校准方法来去除失调像差。在这项工作中，通过对实验中测试波前的五个选定低阶像差计算得到的实际失调，在模型中进行模拟，以通过光线追迹预测所有失调像差。然后通过简单的波前数据减法去除这些像差。该方法既不依赖于精确的调整机构，也不依赖于麻烦的手动调整。给出了表明所提方法具有可行性和可重复性的实验结果。
