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Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off.

作者信息

Yue Weisheng, Wang Zhihong, Wang Xianbin, Chen Longqing, Yang Yang, Chew Basil, Syed Ahad, Wong Kim Chong, Zhang Xixiang

机构信息

Advanced Nanofabrication and Imaging Core Lab, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia.

出版信息

J Nanosci Nanotechnol. 2012 Jan;12(1):696-9. doi: 10.1166/jnn.2012.5382.

DOI:10.1166/jnn.2012.5382
PMID:22524042
Abstract

A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed.

摘要

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