Department of Materials Science & Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, USA.
ACS Nano. 2012 May 22;6(5):4452-60. doi: 10.1021/nn3011834. Epub 2012 May 4.
Uniformity of the dielectric breakdown voltage distribution for several thicknesses of a zirconia-based self-assembled nanodielectric was characterized using the Weibull distribution. Two regimes of breakdown behavior are observed: self-assembled multilayers >5 nm thick are well described by a single two-parameter Weibull distribution, with β ≈ 11. Multilayers ≤5 nm thick exhibit kinks on the Weibull plot of dielectric breakdown voltage, suggesting that multiple characteristic mechanisms for dielectric breakdown are present. Both the degree of uniformity and the effective dielectric breakdown field are observed to be greater for one layer than for two layers of Zr-SAND, suggesting that this multilayer is more promising for device applications.
使用 Weibull 分布对几种厚度的基于氧化锆的自组装纳米电介质的介电击穿电压分布的均匀性进行了表征。观察到两种击穿行为模式：自组装多层膜>5nm 厚的可以用单个双参数 Weibull 分布很好地描述，β≈11。厚度≤5nm 的多层膜在 Weibull 击穿电压图上出现拐点，表明存在多种介电击穿的特征机制。观察到单层 Zr-SAND 的均匀度和有效介电击穿场都大于两层，表明这种多层膜更适合器件应用。
