Kuo Shou-Yi, Chen Wei-Chun, Lai Fang-I, Lin Woei-Tyng, Wang Han-Yang, Hsiao Chien-Nan
Department of Electronic Engineering, Chang Gung University, Taoyuan 333, Taiwan.
J Nanosci Nanotechnol. 2012 Feb;12(2):1620-3. doi: 10.1166/jnn.2012.4658.
Heteroepitaxial growth of metal-catalyst-free indium nitride (InN) nanorods on GaN/sapphire substrates by radio-frequency metal-organic molecular beam epitaxy (RF-MOMBE) system was investigated. We found that different N/In flow ratios together with the growth temperatures greatly influenced the surface morphology of InN nanorods and their structural properties. The InN nanorods have been characterized in detail using X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM). Optical property was evaluated by photoluminescence (PL) measurements. At lower growth temperatures, InN nanorods were successfully grown. A pronounced two-dimensional growth mode was observed at higher growth temperature of 500 degrees C, and these films showed preferred orientation along the c-axis. XRD patterns and SEM images reveal that InN nanorods has high quality wurtzite structure with FWHM approaching 900 arcsec, and they have uniform diameters of about 150 nm and length of about 800 nm. Meanwhile, no metallic droplet was observed at the end of the nanostructured InN, and this is strong evidence that the nanorods are grown via the self-catalyst process. The PL peak at 0.8 eV is attributed to the quantum confinement and Moss-Burstein effects. These observations provide some valuable insights into the physical-chemical process for manufacturing InN nanorods devices.
研究了利用射频金属有机分子束外延(RF-MOMBE)系统在GaN/蓝宝石衬底上无金属催化剂生长氮化铟(InN)纳米棒的异质外延生长过程。我们发现,不同的N/In流量比以及生长温度对InN纳米棒的表面形貌及其结构性质有很大影响。利用X射线衍射(XRD)、场发射扫描电子显微镜(FE-SEM)对InN纳米棒进行了详细表征。通过光致发光(PL)测量评估光学性质。在较低的生长温度下,成功生长出InN纳米棒。在500℃的较高生长温度下观察到明显的二维生长模式,这些薄膜表现出沿c轴的择优取向。XRD图谱和SEM图像表明,InN纳米棒具有高质量的纤锌矿结构,半高宽接近900弧秒,其直径均匀约为150nm,长度约为800nm。同时,在纳米结构InN的末端未观察到金属液滴,这有力地证明了纳米棒是通过自催化过程生长的。0.8eV处的PL峰归因于量子限制和莫斯-伯斯坦效应。这些观察结果为制造InN纳米棒器件的物理化学过程提供了一些有价值的见解。