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使用扩展的Cahn-Hilliard模型模拟薄膜生长中的界面各向异性。

Simulating interfacial anisotropy in thin-film growth using an extended Cahn-Hilliard model.

作者信息

Torabi Solmaz, Lowengrub John

机构信息

Materials Science and Engineering Department, University of California, Irvine, California, USA.

出版信息

Phys Rev E Stat Nonlin Soft Matter Phys. 2012 Apr;85(4 Pt 1):041603. doi: 10.1103/PhysRevE.85.041603. Epub 2012 Apr 16.

DOI:10.1103/PhysRevE.85.041603
PMID:22680484
Abstract

We present an extended Cahn-Hilliard model for simulating interfacial anisotropy in thin-film dynamics by incorporating high-order terms in the energy from an expansion of the energy about an equilibrium state, following earlier work by Abinandanan and Haider [Philos. Mag. Sect. A 81, 2457 (2001)]. For example, to simulate SiGe/Si thin films, where diamond cubic symmetry is needed, fourth order derivatives are included in the energy. This results in a sixth order evolution equation for the order parameter. For less symmetric crystals, one needs to add terms of higher order than fourth order. One advantage of this approach is its intrinsic regularized behavior. In particular, even for strongly anisotropic surface energy, sharp corners will not form and the extended anisotropic Cahn-Hilliard equations are well-posed. For this system we develop an energy-stable numerical scheme in which the energy decreases for any time step. We present two-dimensional (2D) and three-dimensional (3D) numerical results using an adaptive, nonlinear multigrid finite-difference method. We find excellent agreement between the computed equilibrium shapes using the new model and results from an analysis associated with a Wulff construction for energy minimization. The model predictions also compare well with experimental results for silicon voids. In the context of thin films, we observe the formation of interconnected ridges, wires, and fortresses similar to those observed in SiGe/Si thin films.

摘要

我们提出了一个扩展的Cahn-Hilliard模型,用于通过在能量中纳入高阶项来模拟薄膜动力学中的界面各向异性,该高阶项来自于围绕平衡态的能量展开,这是继阿比南达南和海德尔[《哲学杂志》A辑81, 2457 (2001)]的早期工作之后。例如,为了模拟需要金刚石立方对称性的SiGe/Si薄膜,能量中包含了四阶导数。这导致了序参量的一个六阶演化方程。对于对称性较低的晶体,需要添加高于四阶的项。这种方法的一个优点是其固有的正则化行为。特别是,即使对于强各向异性表面能,也不会形成尖角,并且扩展的各向异性Cahn-Hilliard方程是适定的。对于这个系统,我们开发了一种能量稳定的数值格式,其中能量在任何时间步都会降低。我们使用自适应非线性多重网格有限差分法给出了二维(2D)和三维(3D)数值结果。我们发现使用新模型计算得到的平衡形状与能量最小化的Wulff构造相关分析结果之间有很好的一致性。模型预测结果与硅空洞的实验结果也比较吻合。在薄膜的背景下,我们观察到了类似于在SiGe/Si薄膜中观察到的相互连接的脊、线和堡垒的形成。

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