Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow region, Russia.
IEEE Trans Ultrason Ferroelectr Freq Control. 2012 Jun;59(6):1076-84. doi: 10.1109/tuffc.2012.2298.
We report the results of fabrication and investigations of surface periodic domain structures created by a set of quasi-point e-beam irradiations both on the Y- and X-cuts of LiNbO(3), and on Ti:LiNbO(3) and Zn:LiNbO(3) planar waveguides. Domain gratings with spatial periods from 4.75 to 7.25 μm were formed by a 25-keV e-beam. Doses from 500 to 2000 μC/cm(2) were used for different structures to estimate optimal fabrication conditions. The investigations allowed the visualization of the formed surface domain structures, estimation of their uniformity, and determination of waveguide generation of the second optical harmonic. The surface structures can be used in optical devices for the realization of quasi-phase-matched frequency conversion, which includes the creation of compact radiation sources based on waveguides.
我们报告了通过一组准点状电子束在 Y 切和 X 切的 LiNbO(3)以及 Ti:LiNbO(3)和 Zn:LiNbO(3)平面波导上进行辐照,制造和研究表面周期性畴结构的结果。通过 25keV 电子束形成了空间周期从 4.75 到 7.25μm 的畴光栅。使用 500 到 2000μC/cm(2)的剂量来对不同的结构进行处理,以估计最佳的制造条件。研究允许可视化形成的表面畴结构,估计其均匀性,并确定二次光谐波的波导产生。表面结构可用于光学器件中,以实现准相位匹配的频率转换,包括基于波导的紧凑型辐射源的创建。