Emadi Arvin, Wu Huaiwen, de Graaf Ger, Enoksson Peter, Correia Jose Higino, Wolffenbuttel Reinoud
Department of Microelectronics/Electronic Instrumentation, Delft University of Technology, Delft, The Netherlands.
Appl Opt. 2012 Jul 1;51(19):4308-15. doi: 10.1364/AO.51.004308.
An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
一种用于310至400纳米紫外光谱范围的集成电路兼容线性可变光学滤波器（LVOF）已通过光刻胶回流和优化的干法蚀刻工艺制造出来。该LVOF安装在市售CMOS相机顶部，形成一台紫外微型光谱仪。采用了一种基于对氙灯进行初始光谱测量的特殊校准技术。校准期间相机记录的图像用于信号处理算法，以重建汞灯的光谱，校准数据随后用于紫外光谱测量。对采用这种校准方法的基于LVOF制造的微型光谱仪进行的实验显示，其光谱分辨率为0.5纳米。
