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利用扫描电子显微镜中的透射电子前向散射衍射技术,从材料科学样品中获得纳米分辨率的菊池花样。

Nanometres-resolution Kikuchi patterns from materials science specimens with transmission electron forward scatter diffraction in the scanning electron microscope.

机构信息

Mining and Materials Engineering Department, McGill University, Montréal, Canada.

出版信息

J Microsc. 2013 Apr;250(1):1-14. doi: 10.1111/jmi.12007. Epub 2013 Jan 24.

DOI:10.1111/jmi.12007
PMID:23346885
Abstract

A charge-coupled device camera of an electron backscattered diffraction system in a scanning electron microscope was positioned below a thin specimen and transmission Kikuchi patterns were collected. Contrary to electron backscattered diffraction, transmission electron forward scatter diffraction provides phase identification and orientation mapping at the nanoscale. The minimum Pd particle size for which a Kikuchi diffraction pattern was detected and indexed reliably was 5.6 nm. An orientation mapping resolution of 5 nm was measured at 30 kV. The resolution obtained with transmission electron forward scatter diffraction was of the same order of magnitude than that reported in electron nanodiffraction in the transmission electron microscope. An energy dispersive spectrometer X-ray map and a transmission electron forward scatter diffraction orientation map were acquired simultaneously. The high-resolution chemical, phase and orientation maps provided at once information on the chemical form, orientation and coherency of precipitates in an aluminium-lithium 2099 alloy.

摘要

电子背散射衍射系统的电荷耦合器件相机位于薄试样下方,收集透射菊池花样。与电子背散射衍射相反,透射电子前向散射衍射可在纳米尺度上进行相鉴定和取向映射。可靠地检测和索引菊池花样的最小 Pd 颗粒尺寸为 5.6nm。在 30kV 下测量到的取向映射分辨率为 5nm。透射电子前向散射衍射获得的分辨率与透射电子显微镜中的电子纳米衍射报告的分辨率处于同一数量级。同时获得了能量色散谱仪 X 射线图谱和透射电子前向散射衍射取向图谱。高分辨率的化学、相和取向图谱提供了铝合金 2099 中析出物的化学形态、取向和一致性的信息。

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