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一种新型的像差校正、能谱滤波的 LEEM/PEEM 仪器 II. 操作和结果。

A new aberration-corrected, energy-filtered LEEM/PEEM instrument II. Operation and results.

机构信息

IBM T.J. Watson Research Center, 1101 Kitchawan Road, P.O. Box 218, Yorktown Heights, NY 10598, USA.

出版信息

Ultramicroscopy. 2013 Apr;127:25-39. doi: 10.1016/j.ultramic.2012.07.016. Epub 2012 Aug 7.

Abstract

In Part I we described a new design for an aberration-corrected Low Energy Electron Microscope (LEEM) and Photo Electron Emission Microscope (PEEM) equipped with an in-line electron energy filter. The chromatic and spherical aberrations of the objective lens are corrected with an electrostatic electron mirror that provides independent control of the chromatic and spherical aberration coefficients Cc and C3, as well as the mirror focal length. In this Part II we discuss details of microscope operation, how the microscope is set up in a systematic fashion, and we present typical results.

摘要

在第一部分中,我们描述了一种新设计的带有在线电子能量滤波器的像差校正低能电子显微镜(LEEM)和光电发射显微镜(PEEM)。该物镜的色差和球差采用静电电子镜校正,可独立控制色差和球差系数 Cc 和 C3 以及镜焦距。在第二部分中,我们讨论了显微镜操作的细节,如何系统地设置显微镜,并展示了典型的结果。

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