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基于光刻图案化的硒化镉纳米线阵列的场效应晶体管。

Field-effect transistors from lithographically patterned cadmium selenide nanowire arrays.

机构信息

Department of Chemical Engineering and Materials Science, University of California, Irvine, California 92697-2700, USA.

出版信息

ACS Appl Mater Interfaces. 2012 Sep 26;4(9):4445-52. doi: 10.1021/am301302b. Epub 2012 Sep 12.

DOI:10.1021/am301302b
PMID:22957809
Abstract

Field-effect transistors (NWFETs) have been prepared from arrays of polycrystalline cadmium selenide (pc-CdSe) nanowires using a back gate configuration. pc-CdSe nanowires were fabricated using the lithographically patterned nanowire electrodeposition (LPNE) process on SiO(2)/Si substrates. After electrodeposition, pc-CdSe nanowires were thermally annealed at 300 °C × 4 h either with or without exposure to CdCl(2) in methanol-a grain growth promoter. The influence of CdCl(2) treatment was to increase the mean grain diameter from 10 to 80 nm as determined by grazing incidence X-ray diffraction and to convert the crystal structure from cubic to wurtzite. Measured transfer characteristics showed an increase of the field effect mobility (μ(eff)) by an order of magnitude from 1.94 × 10(-4) cm(2)/(V s) to 23.4 × 10(-4) cm(2)/(V s) for pc-CdSe nanowires subjected to the CdCl(2) treatment. The CdCl(2) treatment also reduced the threshold voltage (from 20 to 5 V) and the subthreshold slope (by ~35%). Transfer characteristics for pc-CdSe NWFETs were also influenced by the channel length, L. For CdCl(2)-treated nanowires, μ(eff) was reduced by a factor of eight as L increased from 5 to 25 μm. These channel length effects are attributed to the presence of defects including breaks and constrictions within individual pc-CdSe nanowires.

摘要

采用背栅结构,从多晶硒化镉(pc-CdSe)纳米线阵列中制备出场效应晶体管(NWFET)。pc-CdSe 纳米线是在 SiO2/Si 衬底上使用光刻图案化纳米线电沉积(LPNE)工艺制造的。电沉积后,pc-CdSe 纳米线在 300°C×4h 下进行热退火,无论是否在甲醇中暴露于 CdCl2(晶粒生长促进剂)。CdCl2 处理的影响是将平均晶粒直径从 10nm 增加到 80nm,这是通过掠入射 X 射线衍射确定的,并将晶体结构从立方相转变为纤锌矿相。测量的传输特性表明,经过 CdCl2 处理的 pc-CdSe 纳米线的场效应迁移率(μ(eff))增加了一个数量级,从 1.94×10-4cm2/(V s)增加到 23.4×10-4cm2/(V s)。CdCl2 处理还降低了阈值电压(从 20V 降低到 5V)和亚阈值斜率(降低约 35%)。pc-CdSe NWFET 的传输特性也受到沟道长度 L 的影响。对于 CdCl2 处理的纳米线,当 L 从 5μm 增加到 25μm 时,μ(eff)降低了八倍。这些沟道长度效应归因于单个 pc-CdSe 纳米线中的缺陷,包括断裂和收缩。

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