采用微机电系统（MEMS）工艺对双压电晶片型锆钛酸铅（PZT）悬臂梁进行微加工，用于能量收集应用。

Micromachining of a bimorph Pb(Zr,Ti)O3 (PZT) cantilever using a micro-electromechanical systems (MEMS) process for energy harvesting application.

作者信息

Kim Moonkeun, Hwang Beomseok, Jeong Jaehwa, Min Nam Ki, Kwon Kwang-Ho

机构信息

Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Republic of Korea.

出版信息

J Nanosci Nanotechnol. 2012 Jul;12(7):6011-5. doi: 10.1166/jnn.2012.6365.

DOI:10.1166/jnn.2012.6365

PMID:22966699

Abstract

We designed and fabricated a bimorph Pb(Zr,Ti)O3 (PZT) cantilever with an integrated Si proof mass to obtain a low resonant frequency for an energy harvesting application. The cantilevers were fabricated on the micro-electromechanical systems (MEMS) scale. A mode of piezoelectric conversions were d31 and d33 mode in cantilever vibration Therefore, we designed and fabricated a single cantilever with d31 unimorph, d31 bimorph, d33 unimorph, and d33 bimorph modes. Finally, we fabricated a device with beam dimensions of about 5,400 microm x 480 microm x 14 microm (< +/- 5%), and an integrated Si proof mass with dimensions of about 1,481 microm x 988 microm x 450 microm (< +/- 5%). In order to measure the d31 and d33 modes, we fabricated top and bottom electrodes. The distance between the top electrodes was 50 microm and the resonant frequency was 89.4 Hz. The average powers of the d31 unimorph, d31 bimorph, d33 unimorph, and d33 bimorph modes were 3.90, 9.60, 21.42, and 22.47 nW at 0.8 g (g = 9.8 m/s2) and optimal resistance, respectively.

摘要

我们设计并制造了一种带有集成硅质验证质量块的双压电晶片铅锆钛酸铅（PZT）悬臂梁，以获得用于能量收集应用的低共振频率。这些悬臂梁是在微机电系统（MEMS）规模上制造的。在悬臂梁振动中，压电转换模式为d31和d33模式。因此，我们设计并制造了具有d31单压电晶片、d31双压电晶片、d33单压电晶片和d33双压电晶片模式的单个悬臂梁。最后，我们制造了一种器件，其梁尺寸约为5400微米×480微米×14微米（±5%），以及一个尺寸约为1481微米×988微米×450微米（±5%）的集成硅质验证质量块。为了测量d31和d33模式，我们制造了顶部和底部电极。顶部电极之间的距离为50微米，共振频率为89.4赫兹。在0.8g（g = 9.8米/秒²）和最佳电阻条件下，d31单压电晶片、d31双压电晶片、d33单压电晶片和d33双压电晶片模式的平均功率分别为3.90、9.60、21.42和22.47纳瓦。