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基于一维纳米结构金属氧化物的气体传感器:综述。

Gas sensors based on one dimensional nanostructured metal-oxides: a review.

机构信息

Department of Mechanical Engineering, Faculty of Engineering, University of Malaya, 50603 Kuala Lumpur, Malaysia.

出版信息

Sensors (Basel). 2012;12(6):7207-58. doi: 10.3390/s120607207. Epub 2012 May 30.

Abstract

Recently one dimensional (1-D) nanostructured metal-oxides have attracted much attention because of their potential applications in gas sensors. 1-D nanostructured metal-oxides provide high surface to volume ratio, while maintaining good chemical and thermal stabilities with minimal power consumption and low weight. In recent years, various processing routes have been developed for the synthesis of 1-D nanostructured metal-oxides such as hydrothermal, ultrasonic irradiation, electrospinning, anodization, sol-gel, molten-salt, carbothermal reduction, solid-state chemical reaction, thermal evaporation, vapor-phase transport, aerosol, RF sputtering, molecular beam epitaxy, chemical vapor deposition, gas-phase assisted nanocarving, UV lithography and dry plasma etching. A variety of sensor fabrication processing routes have also been developed. Depending on the materials, morphology and fabrication process the performance of the sensor towards a specific gas shows a varying degree of success. This article reviews and evaluates the performance of 1-D nanostructured metal-oxide gas sensors based on ZnO, SnO(2), TiO(2), In(2)O(3), WO(x), AgVO(3), CdO, MoO(3), CuO, TeO(2) and Fe(2)O(3). Advantages and disadvantages of each sensor are summarized, along with the associated sensing mechanism. Finally, the article concludes with some future directions of research.

摘要

近年来,一维(1-D)纳米结构金属氧化物因其在气体传感器中的潜在应用而受到广泛关注。1-D 纳米结构金属氧化物提供了高的表面积与体积比,同时保持良好的化学和热稳定性,功耗低,重量轻。近年来,已经开发出各种用于合成 1-D 纳米结构金属氧化物的加工路线,例如水热法、超声辐射、静电纺丝、阳极氧化、溶胶-凝胶法、熔融盐法、碳热还原法、固态化学反应法、热蒸发法、气相输运法、气溶胶法、射频溅射法、分子束外延法、化学气相沉积法、气相辅助纳米刻蚀法、紫外光刻法和干法等离子体刻蚀法。也已经开发出了各种传感器制造加工路线。根据材料、形态和制造工艺的不同,传感器对特定气体的性能表现出不同程度的成功。本文综述和评估了基于 ZnO、SnO(2)、TiO(2)、In(2)O(3)、WO(x)、AgVO(3)、CdO、MoO(3)、CuO、TeO(2)和 Fe(2)O(3)的 1-D 纳米结构金属氧化物气体传感器的性能。总结了每种传感器的优缺点,以及相关的传感机制。最后,本文对未来的研究方向进行了总结。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/be8c/3435973/5da0586d489f/sensors-12-07207f1.jpg

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