Department of Solid State Physics, University of Siegen, ENC, D-57072 Siegen, Germany.
Ultrasonics. 2012 Dec;52(8):989-95. doi: 10.1016/j.ultras.2012.07.011. Epub 2012 Aug 10.
Lead Zirconate Titanate (PZT) is a piezo-electric ceramic material that needs to be characterized for its potential use in microelectronics. Energy dispersive X-ray analysis (EDX) is conducted to determine the chemical composition of the PZT ceramics. The scanning electron microscope (SEM) is performed to study the surface morphology, grain structure and grain boundaries. The SEM image helps us to understand the surface wave propagation and scattering phenomena by the PZT and the reason for its anisotropy and inhomogeneity due to the grain structure. In this paper scanning acoustic microscopy at 100 MHz excitation frequency is conducted for determining mechanical properties of PZT. Earlier works reported only the longitudinal wave speed in PZT while in this paper longitudinal, shear and surface acoustic wave speeds of sintered PZT are measured from its acoustic material signature (AMS) curves, also known as V(z) curves. AMS or V(z) curve is the variation of the output voltage as a function of the distance between the acoustic lens focal point and the reflecting surface. The average velocities of longitudinal, shear and surface acoustic waves in a PZT specimen are determined from its V(z) curve generated at 100 MHz excitation frequency and found to be over 5000 m/s, over 3000 m/s and between 2500 and 3000 m/s, respectively. From these velocities all elastic constants of the specimen are obtained.
锆钛酸铅（PZT）是一种压电陶瓷材料，需要对其进行特性分析，以确定其在微电子学中的潜在用途。进行了能量色散 X 射线分析（EDX），以确定 PZT 陶瓷的化学成分。进行了扫描电子显微镜（SEM）分析，以研究其表面形态、晶粒结构和晶界。SEM 图像帮助我们了解 PZT 的表面波传播和散射现象，以及由于晶粒结构导致的各向异性和不均匀性的原因。本文采用 100MHz 激励频率的扫描声学显微镜来确定 PZT 的机械性能。早期的工作仅报道了 PZT 中的纵波速度，而本文则从其声学材料特征（AMS）曲线（也称为 V(z)曲线）测量了烧结 PZT 的纵波、剪切波和表面声波速度。AMS 或 V(z)曲线是输出电压随声透镜焦点和反射面之间距离变化的函数。从 100MHz 激励频率下生成的 V(z)曲线确定了 PZT 试样中纵波、剪切波和表面声波的平均速度，分别超过 5000m/s、超过 3000m/s 和在 2500 至 3000m/s 之间。从这些速度可以获得试样的所有弹性常数。
