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PLD 法在 R -plane 蓝宝石和 LaAlO3 衬底上生长的 Bi(1.5-x)Zn(0.92-y)Nb(1.5)O(6.92-δ)薄膜的结构、光学和介电性能。

Structural, optical, and dielectric properties of Bi(1.5-x)Zn(0.92-y)Nb(1.5)O(6.92-δ) thin films grown by PLD on R-plane sapphire and LaAlO3 substrates.

机构信息

Institut des Sciences Chimiques de Rennes, UMR-CNRS 6226, Université de Rennes 1, 263 av. Gal Leclerc, 35042 Rennes, France.

出版信息

ACS Appl Mater Interfaces. 2012 Oct 24;4(10):5227-33. doi: 10.1021/am301152r. Epub 2012 Oct 8.

DOI:10.1021/am301152r
PMID:22994246
Abstract

Bi(1.5-x)Zn(0.92-y)Nb(1.5)O(6.92-δ) thin films have the potential to be implemented in microwave devices. This work aims to establish the effect of the substrate and of the grain size on the optical and dielectric properties. Bi(1.5-x)Zn(0.92-y)Nb(1.5)O(6.92-δ) thin films were grown at 700 °C via pulsed-laser deposition on R-plane sapphire and (100)(pc) LaAlO(3) substrates at various oxygen pressures (30, 50, and 70 Pa). The structure, morphology, dielectric and optical properties were investigated. Despite bismuth and zinc deficiencies, with respect to the Bi(1.5)Zn(0.92)Nb(1.5)O(6.92) stoichiometry, the films show the expected cubic pyrochlore structure with a (100) epitaxial-like growth. Different morphologies and related optical and dielectric properties were achieved, depending on the substrate and the oxygen pressure. In contrast to thin films grown on (100)(pc) LaAlO(3), the films deposited on R-plane sapphire are characterized by a graded refractive index along the layer thickness. The refractive index (n) at 630 nm and the relative permittivity (ε(r)) measured at 10 GHz increase with the grain size: on sapphire, n varies from 2.29 to 2.39 and ε(r) varies from 85 to 135, when the grain size increases from 37 nm to 77 nm. On the basis of this trend, visible ellipsometry can be used to probe the characteristics in the microwave range quickly, nondestructively, and at a low cost.

摘要

Bi(1.5-x)Zn(0.92-y)Nb(1.5)O(6.92-δ) 薄膜有望应用于微波器件。本工作旨在研究衬底和晶粒尺寸对光学和介电性能的影响。通过脉冲激光沉积法,在 700°C 下,于不同氧压(30、50 和 70 Pa)下,在 R 面蓝宝石和(100)(pc) LaAlO(3)衬底上生长 Bi(1.5-x)Zn(0.92-y)Nb(1.5)O(6.92-δ) 薄膜。研究了薄膜的结构、形貌、介电和光学性能。尽管铋和锌存在不足,相对于 Bi(1.5)Zn(0.92)Nb(1.5)O(6.92)化学计量比,薄膜仍呈现出预期的立方钙钛矿结构,具有(100)外延样生长。不同的形貌和相关的光学和介电性能取决于衬底和氧压。与在(100)(pc) LaAlO(3)上生长的薄膜不同,沉积在 R 面蓝宝石上的薄膜沿层厚表现出渐变折射率。在 630nm 处的折射率(n)和在 10GHz 处测量的相对介电常数(ε(r))随晶粒尺寸增大而增大:在蓝宝石上,n 从 2.29 变化到 2.39,ε(r)从 85 变化到 135,当晶粒尺寸从 37nm 增加到 77nm 时。基于这一趋势,可见角谱法可以快速、非破坏性、低成本地探测微波范围内的特性。

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