Liang Guanquan, Danner Aaron J, Lee Chengkuo
Department of Electrical and Computer Engineering, National University of Singapore 117576, Singapore.
Opt Express. 2012 Aug 13;20(17):18937-45. doi: 10.1364/OE.20.018937.
We propose a type of photonic resonator with a tunable curved cavity that enables efficient tuning of the optical length of a resonant cavity made of a solid material; we call this a "tunable curved resonator" (TCR). Its integration with a "tunable curved waveguide" (TCWG) and their actuation by a MEMS (micro electromechanical systems) electrostatic comb actuator are also designed for integrated photonic circuits. With this kind of structure, a widely and continuously tunable narrow-band resonance ranging up to 200 nm is achieved with a MEMS actuation voltage less than 70 V. Its applications in widely tunable photonic filters and lasers are promising.
我们提出了一种具有可调谐弯曲腔的光子谐振器，它能够有效调节由固体材料制成的谐振腔的光学长度；我们将其称为“可调谐弯曲谐振器”（TCR）。它与“可调谐弯曲波导”（TCWG）的集成以及通过MEMS（微机电系统）静电梳状致动器对它们的驱动也被设计用于集成光子电路。采用这种结构，在小于70 V的MEMS驱动电压下可实现高达200 nm的广泛且连续可调的窄带谐振。其在广泛可调谐光子滤波器和激光器中的应用前景广阔。
