College of Engineering, Mathematics and Physical Sciences, University of Exeter, Exeter EX4 4QF, UK.
Nanoscale. 2012 Nov 21;4(22):7031-7. doi: 10.1039/c2nr32169f.
This manuscript first describes a simple synthesis of tungsten oxide (WO(x)) nanorods from templated W foil using a chemical vapour deposition (CVD) technique at 600-750 °C, then presents the formation of tungsten oxynitride (WO(x)N(y)) nanorods via nitridation at 650 °C for different reaction times. The W foil, blade engraved, acid etched, or spin coated with Au-block copolymer composites then plasma etched, was used as a substrate for the nanorod growth. The Au patterns that were created on the surface of a W foil following the removal of the copolymer, led to a reverse patterned growth of WO(x) nanorods on the Au free areas. Consequently, following the oxide-to-nitride conversion, WO(x)N(y) nanorods were obtained with an identical patterned feature as to that of the parental WO(x). Combined techniques including XRD, SEM, TEM and Raman were used to visualise and analyse the resulting WO(x) and WO(x)N(y) nanorods. The diameter, length, and chemical composition of the nanorods are found to vary with reaction time and temperatures, as well as different substrate pre-treatments. This result represents a simple, innovative and efficient process for reverse-patterned growth of new nanomaterials.
本文首先描述了一种简单的方法，通过在 600-750°C 下使用化学气相沉积（CVD）技术，从模板化 W 箔上合成氧化钨（WO(x)）纳米棒，然后通过在 650°C 下进行氮化反应不同的反应时间来形成钨氧氮化物（WO(x)N(y)）纳米棒。W 箔经过刀片雕刻、酸蚀刻或旋涂 Au 嵌段共聚物复合材料，然后进行等离子体蚀刻，用作纳米棒生长的基底。在共聚物去除后，在 W 箔表面上形成的 Au 图案导致 WO(x)纳米棒在无 Au 区域上的反向图案化生长。因此，在氧化到氮化的转化之后，得到了具有与母体 WO(x)相同图案特征的 WO(x)N(y)纳米棒。X 射线衍射（XRD）、扫描电子显微镜（SEM）、透射电子显微镜（TEM）和拉曼等综合技术用于可视化和分析所得的 WO(x)和 WO(x)N(y)纳米棒。发现纳米棒的直径、长度和化学成分随反应时间和温度以及不同的基底预处理而变化。该结果代表了一种用于新型纳米材料反向图案化生长的简单、创新和高效的方法。
