Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48105, USA.
Nanotechnology. 2012 Nov 16;23(45):455301. doi: 10.1088/0957-4484/23/45/455301. Epub 2012 Oct 19.
We present a novel approach to the fabrication of zero-mode waveguides (ZMWs) using inexpensive processing techniques. Our method is capable of rapid fabrication of circular nanoapertures with diameters ranging from 70 nm to 2 μm, allowing us to perform a detailed characterization of the dependence of the fluorescence emission on the waveguide diameter. We also validated the use of the fabricated ZMWs by detecting single molecule binding events with a signal-to-noise ratio of ten.
我们提出了一种使用廉价处理技术制造零模波导（ZMW）的新方法。我们的方法能够快速制造直径从 70nm 到 2μm 的圆形纳米孔，使我们能够详细地研究荧光发射对波导直径的依赖性。我们还通过检测具有 10 倍信噪比的单个分子结合事件，验证了所制造的 ZMW 的用途。
