Laboratory for MEMS Applications, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany.
Sensors (Basel). 2012;12(8):10550-65. doi: 10.3390/s120810550. Epub 2012 Aug 3.
In this paper a multi-disciplinary simulation of a capacitive droplet sensor based on an open plate capacitor as transducing element is presented. The numerical simulations are based on the finite volume method (FVM), including calculations of an electric field which changes according to the presence of a liquid droplet. The volume of fluid (VOF) method is applied for the simulation of the ejection process of a liquid droplet out of a dispenser nozzle. The simulations were realised using the computational fluid dynamic (CFD) software CFD ACE+. The investigated capacitive sensing principle enables to determine the volume of a micro droplet passing the sensor capacitor due to the induced change in capacity. It could be found that single droplets in the considered volume range of 5 nL < V(drop) < 100 nL lead to a linear change of the capacity up to ΔQ < 30 fC. The sensitivity of the focused capacitor geometry was evaluated to be S(i) = 0.3 fC/nL. The simulation results are validated by experiments which exhibit good agreement.
本文提出了一种基于开放式平板电容器作为换能元件的电容式液滴传感器的多学科仿真。数值模拟基于有限体积法(FVM),包括根据液滴的存在而变化的电场计算。应用体积流体(VOF)方法来模拟从分配器喷嘴中喷射出液滴的过程。使用计算流体动力学(CFD)软件 CFD ACE+ 进行了模拟。所研究的电容感应原理能够确定通过传感器电容器的微液滴的体积,因为容量会发生感应变化。可以发现,在所考虑的体积范围内 5 nL < V(drop) < 100 nL 的单个液滴会导致电容线性变化,直到 ΔQ < 30 fC。评估了聚焦电容器几何形状的灵敏度,结果为 S(i) = 0.3 fC/nL。实验验证了模拟结果,结果吻合良好。