Xu HanYang, Zhao Yulong, Zhang Kai, Jiang Kyle
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
School of Mechanical Engineering, University of Birmingham, Birmingham B15 2TT, UK.
Sensors (Basel). 2020 Jul 2;20(13):3711. doi: 10.3390/s20133711.
This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12° to ±360°, and the resolution of the sensor was 0.4°. This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors.
本文提出了一种新型的电容式液态金属微机电系统（MEMS）倾角传感器，并介绍了其设计、制造和信号测量方法。该传感器采用三层基板构建。一个导电液滴沿着中间基板的环形凹槽滚动以反映角位移，并用电容器检测液滴的位置。数值模拟工作提供了传感器的工作原理和结构设计，并提出了传感器的制造工艺。此外，还设计了静态电容测试和动态信号测试。该传感器的测量范围很宽，从±2.12°到±360°，分辨率为0.4°。该传感器进一步扩展了先前液滴MEMS倾角传感器的测量范围。
