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溶胶-凝胶法制备的 Bi(Zn(1/2)Zr(1/2))O3-PbTiO3 铁电薄膜具有大剩余极化和小漏电流。

Large remanent polarization and small leakage in sol-gel derived Bi(Zn(1/2)Zr(1/2))O3-PbTiO3 ferroelectric thin films.

机构信息

Department of Physical Chemistry, University of Science and Technology Beijing, Beijing 100083, China.

出版信息

Dalton Trans. 2013 Jan 14;42(2):585-90. doi: 10.1039/c2dt31996a. Epub 2012 Nov 23.

DOI:10.1039/c2dt31996a
PMID:23175154
Abstract

The applications of ferroelectric thin films such as the sensitivity of nonvolatile ferroelectric random access memories are closely linked with large remnant polarization. The high-T(C) (1-x)Bi(Zn(1/2)Zr(1/2))O(3)-xPbTiO(3) (x = 0.7-0.9) thin films with high (100) orientation were fabricated on Pt(111)/Ti/SiO(2)/Si substrates via a sol-gel method. The thin films could be crystallized well in a phase-pure perovskite structure. The electrical properties of the sol-gel-derived BZZ-PT thin films were investigated. A large remanent polarization with 2P(r) up to 110 μC cm(-2) and a small leakage current of 3.8 × 10(-7) A cm(-2) under an electric field of 150 kV cm(-1) are observed on the 0.2BZZ-0.8PT thin films. Furthermore, a relatively stable polarization fatigue property was achieved, indicating a potential application in high-temperature ferroelectric devices.

摘要

铁电薄膜的应用,如非易失性铁电随机存取存储器的灵敏度,与大剩余极化密切相关。高(100)取向的高 T(C)(1-x)Bi(Zn(1/2)Zr(1/2))O(3)-xPbTiO(3)(x = 0.7-0.9)薄膜通过溶胶-凝胶法在 Pt(111)/Ti/SiO(2)/Si 衬底上制备。薄膜可以在纯钙钛矿结构中很好地结晶。研究了溶胶-凝胶衍生的 BZZ-PT 薄膜的电学性能。在 150 kV cm(-1)电场下,0.2BZZ-0.8PT 薄膜的剩余极化值高达 2P(r)为 110 μC cm(-2),漏电流为 3.8 × 10(-7)A cm(-2)。此外,还实现了相对稳定的极化疲劳性能,表明其在高温铁电器件中有潜在的应用。

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