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引用本文的文献
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Multi-photon vertical cross-sectional imaging with a dynamically-balanced thin-film PZT z-axis microactuator.
J Microelectromech Syst. 2017 Oct;26(5):1018-1029. doi: 10.1109/JMEMS.2017.2701798. Epub 2017 May 19.
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