Advanced Functional Thin Film Department, Korea Institute of Materials Science, Changwon, Gyeongnam, Republic of Korea.
ACS Appl Mater Interfaces. 2013 Jan;5(1):164-72. doi: 10.1021/am302341p. Epub 2012 Dec 14.
We report the fabrication of a highly flexible indium tin oxide (ITO) electrode that is completely transparent to light in the visible spectrum. The electrode was fabricated via the formation of a novel ITO nanoarray structure, consisting of discrete globular ITO nanoparticles superimposed on an agglomerated ITO layer, on a heat-sensitive polymer substrate. The ITO nanoarray spontaneously assembled on the surface of the polymer substrate by a simple sputter coating at room temperature, without nanolithographic or solution-based assembly processes being required. The ITO nanoarray exhibited a resistivity of approximately 2.3 × 10(-3) Ω cm and a specular transmission of about 99% at 550 nm, surpassing all previously reported values of these parameters in the case of transparent porous ITO electrodes synthesized via solution-based processes at elevated temperatures. This novel nanoarray structure and its fabrication methodology can be used for coating large-area transparent electrodes on heat-sensitive polymer substrates, a goal unrealizable through currently available solution-based fabrication methods.
我们报告了一种高度灵活的氧化铟锡（ITO）电极的制造方法，该电极在可见光谱范围内完全透光。该电极通过形成一种新颖的 ITO 纳米阵列结构来制造，该结构由离散的球状 ITO 纳米颗粒叠加在聚集的 ITO 层上组成，位于热敏聚合物基底上。ITO 纳米阵列通过简单的室温溅射涂层在聚合物基底表面自发组装，无需纳米光刻或基于溶液的组装工艺。ITO 纳米阵列的电阻率约为 2.3×10(-3)Ωcm，在 550nm 处的镜面透射率约为 99%，超过了所有先前报道的通过高温下基于溶液的工艺合成的透明多孔 ITO 电极的这些参数值。这种新型的纳米阵列结构及其制造方法可用于在热敏聚合物基底上涂覆大面积透明电极，这是目前基于溶液的制造方法无法实现的目标。
