Monash Centre for Electron Microscopy, Monash University, Victoria 3800, Australia.
Ultramicroscopy. 2013 Feb;125:49-58. doi: 10.1016/j.ultramic.2012.10.002. Epub 2012 Nov 8.
A simple method is described for the accurate and precise measurement of chromatic aberration under electron-optical conditions pertinent to scanning transmission electron microscopy (STEM) and scanning confocal electron microscopy (SCEM). The method requires only the measurement of distances in a coherent CBED pattern and knowledge of the electron wavelength and the lattice spacing of a calibration specimen. The chromatic aberration of a spherical-aberration corrected 300 kV thermal field emission TEM is measured in STEM and SCEM operating modes and under different condenser lens settings. The effect of the measured chromatic aberrations on the 3 dimensional intensity distribution of the electron probe is also considered.
一种简单的方法被描述用于在与扫描透射电子显微镜（STEM）和扫描共聚焦电子显微镜（SCEM）相关的电子光学条件下精确测量色差。该方法只需要测量相干 CBED 模式中的距离以及电子波长和校准样品的晶格间距的知识。在 STEM 和 SCEM 操作模式下以及在不同的聚光镜设置下测量了经过球差校正的 300kV 热场发射 TEM 的色差。还考虑了测量色差对电子探针的三维强度分布的影响。
