Institute of Microelectronic Materials and Technology, State Key Laboratory of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China.
Nanoscale Res Lett. 2013 Jan 12;8(1):25. doi: 10.1186/1556-276X-8-25.
Doping with other elements is one of the efficient ways to modify the physical and chemical properties of TiO2 nanomaterials. In the present work, anatase TiO2 nanofilms doped with Al and V elements were fabricated through anodic oxidation of Ti6Al4V alloy and further annealing treatment. Hydrogen sensing behavior of the crystallized Ti-Al-V-O nanofilms at various working temperatures was investigated through exposure to 1,000 ppm H2. Different from n-type hydrogen sensing characteristics of undoped TiO2 nanotubes, the Al- and V-doped nanofilms presented a p-type hydrogen sensing behavior by showing increased resistance upon exposure to the hydrogen-containing atmosphere. The Ti-Al-V-O nanofilm annealed at 450°C was mainly composed of anatase phase, which was sensitive to hydrogen-containing atmosphere only at elevated temperatures. Annealing of the Ti-Al-V-O nanofilm at 550°C could increase the content of anatase phase in the oxide nanofilm and thus resulted in a good sensitivity and resistance recovery at both room temperature and elevated temperatures. The TiO2 nanofilms doped with Al and V elements shows great potential for use as a robust semiconducting hydrogen sensor.
掺杂其他元素是改性 TiO2 纳米材料物理化学性质的有效方法之一。本工作通过 Ti6Al4V 合金阳极氧化及后续退火处理,制备了掺 Al 和 V 元素的锐钛矿 TiO2 纳米薄膜。通过在 1000 ppm H2 下暴露,研究了不同工作温度下结晶的 Ti-Al-V-O 纳米薄膜的氢气传感行为。与未掺杂 TiO2 纳米管的 n 型氢气传感特性不同,掺 Al 和 V 的纳米薄膜呈现 p 型氢气传感行为,即在暴露于含氢气氛时电阻增加。在 450°C 退火的 Ti-Al-V-O 纳米薄膜主要由锐钛矿相组成,仅在高温下对含氢气氛敏感。在 550°C 退火可以增加氧化物纳米薄膜中锐钛矿相的含量,从而在室温及高温下均具有良好的灵敏度和电阻恢复性。掺 Al 和 V 元素的 TiO2 纳米薄膜有望成为一种稳健的半导体氢气传感器。