Koike Kazuyuki
Division of Physics, Graduate School of Science, Hokkaido University, Kita 10, Nishi 8, Kita-ku, Sapporo, Japan.
Microscopy (Oxf). 2013 Feb;62(1):177-91. doi: 10.1093/jmicro/dfs092. Epub 2013 Jan 16.
Spin-polarized scanning electron microscopy (spin-SEM) is a magnetic domain observation method. In spin-SEM, polarization of secondary electrons emitted from a sample in a scanning electron microscope is detected by a spin detector and used as a signal for forming an image. The characteristics of spin-SEM are detection of all three magnetization vector components, which leads to the detection of the magnetization vector direction, high spatial resolution of around 3 nm and applicability to samples with rough or even 3D surfaces. Spin-SEM combined with other imaging methods using an electron probe beam such as scanning Auger electron microscopy for imaging element distribution and electron backscattering diffraction microscopy for imaging crystal direction distribution provides additional information that is important to study the magnetism. Spin-SEM with these excellent characteristics has a broad range of applications from basic research to applied research and developments in various industries.
自旋极化扫描电子显微镜（spin-SEM）是一种磁畴观测方法。在自旋扫描电子显微镜中，扫描电子显微镜中样品发射的二次电子的极化由自旋探测器检测，并用作形成图像的信号。自旋扫描电子显微镜的特点是能检测所有三个磁化矢量分量，从而检测磁化矢量方向，具有约3纳米的高空间分辨率，适用于表面粗糙甚至三维表面的样品。自旋扫描电子显微镜与其他使用电子探针束的成像方法相结合，如用于成像元素分布的扫描俄歇电子显微镜和用于成像晶体方向分布的电子背散射衍射显微镜，可提供对研究磁性很重要的额外信息。具有这些优异特性的自旋扫描电子显微镜在从基础研究到各行业的应用研究与开发等广泛领域都有应用。
