Kohashi Teruo, Motai Kumi, Matsuyama Hideo, Maruyama Yohji
Research and Development Group, Hitachi, Ltd., 2520, Akanuma, Hatoyama, Saitama 350-0395, Japan.
Research and Development Group, Hitachi, Ltd., 1-280, Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan.
Microscopy (Oxf). 2021 Oct 5;70(5):436-441. doi: 10.1093/jmicro/dfab011.
Operando observation using spin-polarized scanning electron microscopy (spin SEM) has been demonstrated by detecting changes in the magnetization in the writing head of a hard disk drive (HDD) during operation. A current-applying system developed for use in the sample stage of a spin SEM enables imaging of the magnetization changes in the writing head of an HDD while the writing head is activated. Focused ion beam (FIB) technology is used to fabricate electric contacts between the head terminals and the sample holder electrodes. Tungsten film is deposited by FIB technology on the insulator around the writing head to prevent electrostatic charge buildup in the insulators during SEM measurement. This system is well suited for studying the characteristics of writing heads in HDDs in an activated state.
通过检测硬盘驱动器（HDD）写入头在运行过程中的磁化变化，已证明使用自旋极化扫描电子显微镜（自旋SEM）进行操作观察。为自旋SEM的样品台开发的电流施加系统能够在写入头激活时对HDD写入头的磁化变化进行成像。聚焦离子束（FIB）技术用于在磁头端子和样品架电极之间制造电接触。通过FIB技术在写入头周围的绝缘体上沉积钨膜，以防止在扫描电子显微镜测量期间绝缘体中积聚静电荷。该系统非常适合研究处于激活状态的HDD中写入头的特性。
