Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Nano Lett. 2013 Feb 13;13(2):835-9. doi: 10.1021/nl400006c. Epub 2013 Jan 28.
The directed self-assembly of 3-miktoarm star terpolymer chains (polyisoprene-arm-polystyrene-arm-polyferrocenylethylmethylsilane (3 μ-ISF)) into 2D Archimedean tilings is described. A morphological change from (4.8(2)) to (6(3)) tiling is reported in the 3 μ-ISF thin film blended with PS homopolymer when a greater swelling of PI is achieved during the solvent annealing process. Highly oriented (4.8(2)) tilings were produced by templating the self-assembled three colored structures in blended thin films. The use of (4.8(2)) and (6(3)) tilings as nanolithographic masks to transfer square and triangular hole arrays into the substrate is also demonstrated.
描述了 3-微嵌段星形三嵌段共聚物链(聚异戊二烯臂-聚苯乙烯臂-聚二茂铁乙基甲基硅烷(3μ-ISF))在溶剂退火过程中,当 PI 溶胀更大时,从(4.8(2))到(6(3))的二维密铺图案的定向自组装。通过在共混薄膜中对自组装的三彩色结构进行模板化,制备出高度取向的(4.8(2))密铺图案。还展示了将方孔和三角孔阵列转移到基底的(4.8(2))和(6(3))密铺图案作为纳米光刻掩模的用途。