Department of Mechanical and Materials Engineering, University of Nebraska, Lincoln, NE, USA.
IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Dec;58(12):2588-95. doi: 10.1109/TUFFC.2011.2122.
We study frequency shifts in plate crystal resonators with surface films. The films are multiphysical, including the effects of inertia, stiffness, intrinsic stress, piezoelectric coupling, and piezomagnetic coupling. Mindlin's two-dimensional equations for a crystal plate with two elastic surface films are generalized to include the multiphysical effects of the films. They are used to study thickness-shear vibrations of a rotated Y-cut quartz plate with initial fields resulting from the mechanical, electric, and magnetic fields in the surface films. Frequency shifts caused by the initial fields are calculated and examined. Results show that plate crystal resonators with multiphysical surface films may be used for electric/magnetic field sensing.
我们研究了带有表面薄膜的板状晶体谐振器的频率位移。这些薄膜具有多种物理特性，包括惯性、刚度、固有应力、压电耦合和压磁耦合的影响。我们将 Mindlin 的二维方程推广到具有两个弹性表面膜的晶体板中，以包括薄膜的多种物理效应。这些方程用于研究初始场由表面膜中的机械、电和磁场引起的旋转 Y 切石英板的厚度剪切振动。计算并研究了由初始场引起的频率位移。结果表明，具有多种物理特性表面薄膜的板状晶体谐振器可用于电场/磁场感测。
