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Ptycholographic iterative engine with self-positioned scanning illumination.

作者信息

Pan Xinchen, Liu Cheng, Lin Qiang, Zhu Jianqiang

机构信息

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.

出版信息

Opt Express. 2013 Mar 11;21(5):6162-8. doi: 10.1364/OE.21.006162.

DOI:10.1364/OE.21.006162
PMID:23482184
Abstract

A special optical alignment is adopted and corresponding reconstruction algorithm is developed to reduce the reconstruction error induced by the hysteresis or backlash error of the translation stage in Ptychographical Iterative Engine (PIE) imaging with weak scattering specimen. In this suggested method, the positions of the scanning probe are determined directly from the recorded diffraction patterns rather than from the readout of the stage meter. This method not only remarkably improves the reconstruction quality, but also completely lowers the dependency of PIE on the device accuracy and accordingly enhances its feasibility for many applications with weak scattering specimen.

摘要

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