用于宽带基底去除电光调制器的电极。

Electrodes for wide-bandwidth substrate-removed electro-optic modulators.

机构信息

Electrical and Computer Engineering Department, University of California at Santa Barbara, Santa Barbara, California 93106, USA.

出版信息

Opt Lett. 2013 Mar 15;38(6):914-6. doi: 10.1364/OL.38.000914.

DOI:10.1364/OL.38.000914

PMID:23503258

Abstract

This Letter is on wide-bandwidth electrodes suitable for ultralow voltage substrate-removed compound semiconductor electro-optic modulators. Using a loaded line approach, traveling wave electrodes suitable for wide-bandwidth and low-voltage operation were studied theoretically and experimentally up to 35 GHz. Using staircase waveguides and n-i-p-i-n epilayer designs, electrode capacitance and resistance were reduced significantly. Experimental and modeling results are found to agree very well. Theoretical and experimental results indicate that subvolt modulators with electrical to optical bandwidths in excess of 30 GHz are possible.

摘要

这封信是关于适用于超低电压衬底去除化合物半导体电光调制器的宽带电极。使用加载线方法，对适用于宽带和低电压操作的行波电极进行了理论和实验研究，最高可达 35 GHz。通过使用阶梯波导和 n-i-p-i-n 外延层设计，显著降低了电极的电容和电阻。实验和建模结果非常吻合。理论和实验结果表明，具有超过 30 GHz 的电光带宽的亚伏级调制器是可能的。