Groupe de Physique des Matériaux, UMR CNRS 6634-Université de Rouen, Saint-Etienne-du-Rouvray, France.
Ultramicroscopy. 2013 Sep;132:19-30. doi: 10.1016/j.ultramic.2013.03.010. Epub 2013 Mar 26.
Atom probe tomography stands out from other materials characterisation techniques mostly due to its capacity to map individual atoms in three-dimensions with high spatial resolution. The methods used to transform raw detector data into a three-dimensional reconstruction have, comparatively to other aspects of the technique, evolved relatively little since their inception more than 15 years ago. However, due to the importance of the fidelity of the data, this topic is currently attracting a lot of interest within the atom probe community. In this review we cover: (1) the main aspects of the image projection, (2) the methods used to build tomographic reconstructions, (3) the intrinsic limitations of these methods, and (4) future potential directions to improve the integrity of atom probe tomograms.
原子探针层析技术主要因其能够以高空间分辨率在三维空间中定位单个原子的能力而脱颖而出。与该技术的其他方面相比,自 15 多年前成立以来,将原始探测器数据转换为三维重建所使用的方法相对变化不大。然而,由于数据保真度的重要性,这个话题目前在原子探针领域引起了广泛关注。在这篇综述中,我们涵盖了:(1) 图像投影的主要方面,(2) 用于构建层析重建的方法,(3) 这些方法的固有局限性,以及 (4) 提高原子探针层析图完整性的未来潜在方向。