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基于柔性薄膜器件的压电器效应。

Piezotronic effect in flexible thin-film based devices.

机构信息

School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0245, USA.

出版信息

Adv Mater. 2013 Jun 25;25(24):3371-9. doi: 10.1002/adma.201300296. Epub 2013 May 2.

DOI:10.1002/adma.201300296
PMID:23636935
Abstract

Flexible piezotronic devices based on RF-sputtered piezoelectric semiconductor thin films have been investigated for the first time. The dominating role of the piezotronic effect over the geometrical and piezoresistive effect in the as-fabricated devices has been confirmed and the modulation effect of the piezopotential on charge carrier transport under different strains is subsequently studied. Moreover, it is also demonstrated that the UV sensing capability of the as-fabricated thin film based piezotronic device can be tuned by the piezopotential, showing significantly enhanced sensitivity and improved reset time under tensile strain.

摘要

首次研究了基于射频溅射压电半导体薄膜的柔性压电器件。证实了压电器件在制造的器件中对几何和压阻效应的主导作用,并随后研究了不同应变下压电势对载流子输运的调制效应。此外,还证明了所制造的薄膜压电器件的紫外传感性能可以通过压电势进行调节,在拉伸应变下显示出显著提高的灵敏度和改善的重置时间。

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