Li Shandong, Liu Ming, Lou J, Xing X, Wu Jianpeng, Hu Yi, Cai Xinle, Xu Feng, Sun Nian X, Duh Jenq-Gong
Department of Physics, Fujian Normal University, Fuzhou 350007, China.
J Nanosci Nanotechnol. 2013 Feb;13(2):1091-4. doi: 10.1166/jnn.2013.5973.
The fabrication and high-frequency ferromagnetic performances of nanocrystalline Fe70Co30-B soft magnetic films were investigated. It is revealed that the composition gradient sputtering method dramatically improves the high-frequency soft magnetic properties of the as-prepared films. This method gives rise to almost a linearly-increased distribution of compositions and residual stress. As a result, a very high ferromagnetic resonance frequency up to 6.7 GHz, high uniaxial magnetic anisotropic field up to 450 Oe, and low magnetic loss were obtained in as-deposited samples, which are particularly in favor of the integration between magnetic films and microwave components.
研究了纳米晶Fe70Co30-B软磁薄膜的制备及其高频铁磁性能。结果表明，成分梯度溅射法显著改善了所制备薄膜的高频软磁性能。该方法导致成分和残余应力几乎呈线性增加分布。因此，在沉积态样品中获得了高达6.7 GHz的非常高的铁磁共振频率、高达450 Oe的高单轴磁各向异性场以及低磁损耗，这特别有利于磁薄膜与微波组件之间的集成。
