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一种使用反卷积技术确定薄层机械和几何特性的超声方法。

An ultrasonic methodology for determining the mechanical and geometrical properties of a thin layer using a deconvolution technique.

机构信息

The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, People's Republic of China.

出版信息

Ultrasonics. 2013 Sep;53(7):1377-83. doi: 10.1016/j.ultras.2013.04.006. Epub 2013 Apr 25.

DOI:10.1016/j.ultras.2013.04.006
PMID:23684471
Abstract

An ultrasonic method is proposed for simultaneously determining the thickness, density, sound velocity, and attenuation of a thin layer from a reflection spectrum at normal incidence. The normal theoretical reflection spectrum of a thin layer is established as a function of three dimensionless parameters to reduce the number of independent parameters. The inverse algorithm, using the least squares method, is adopted to determine the dimensionless parameters, and the corresponding convergence zones are investigated. The measured reflection spectrum at normal incidence is obtained using Wiener filtering, and spectral extrapolations following Wiener filtering are applied to obtain the time-of-flights by identifying the overlapping pulse-echoes inside the thin layer and the superposing pulse-echoes from the reference material and front surface of the specimen. The thickness of the thin layer can then be calculated and as initial estimate for the inverse algorithm. The density, sound velocity, and attenuation are then determined by the measured thin layer thickness and determined dimensionless parameters. Two 500 μm stainless steel and aluminum plates were immersed in coupling water and a 5 MHz flat transducer was applied. The relative errors of measured thickness, density, and sound velocity were less than 6%, and the ultrasound attenuation was close to its true value. The validity of the proposed technique was verified.

摘要

提出了一种超声方法,用于从正入射反射光谱同时确定薄膜的厚度、密度、声速和衰减。将薄膜的正入射理论反射光谱建立为三个无量纲参数的函数,以减少独立参数的数量。采用最小二乘法的逆算法确定无量纲参数,并研究相应的收敛区域。通过识别薄膜内部重叠的脉冲回波以及参考材料和试件前表面的叠加脉冲回波,使用维纳滤波获得正入射的测量反射光谱,并应用维纳滤波后的光谱外推法来获得时间飞行,从而计算出薄膜的厚度,并作为逆算法的初始估计值。然后通过测量的薄膜厚度和确定的无量纲参数来确定密度、声速和衰减。将两块 500μm 的不锈钢和铝板浸入耦合水中,使用 5MHz 的平面换能器。测量厚度、密度和声速的相对误差小于 6%,超声衰减接近真实值。验证了所提出技术的有效性。

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