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利用软基底上的褶皱刚性薄膜作为可调谐光栅进行微应变传感。

Micro-strain sensing using wrinkled stiff thin films on soft substrates as tunable optical grating.

作者信息

Ma Teng, Liang Hanshuang, Chen George, Poon Benny, Jiang Hanqing, Yu Hongbin

机构信息

School for Engineering of Matter, Transport and Energy, Arizona State University, Tempe, AZ, USA.

出版信息

Opt Express. 2013 May 20;21(10):11994-2001. doi: 10.1364/OE.21.011994.


DOI:10.1364/OE.21.011994
PMID:23736421
Abstract

We report a strain sensing approach that utilizes wrinkled patterns on poly (dimethylsiloxane) (PDMS) as an optical grating to measure thermally-induced strain of different materials. The mechanism for the strain sensing and the effect of PDMS grating on strain sensing are discussed. By bonding the PDMS grating onto a copper or silicon substrate, the coefficient of thermal expansion (CTE) of the substrates can be deduced by measuring the diffraction angle change due to the change in PDMS grating periodicity when thermal strain is introduced. The measured CTEs agree well with the known reference values.

摘要

我们报道了一种应变传感方法,该方法利用聚二甲基硅氧烷(PDMS)上的皱纹图案作为光栅来测量不同材料的热致应变。讨论了应变传感的机制以及PDMS光栅对应变传感的影响。通过将PDMS光栅粘结到铜或硅基板上,当引入热应变时,由于PDMS光栅周期性的变化导致衍射角改变,通过测量衍射角的变化可以推导出基板的热膨胀系数(CTE)。测量得到的CTE与已知参考值吻合良好。

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[2]
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