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用于微纳制造的热诱导微型化：进展与更新

Thermally-induced miniaturization for micro- and nanofabrication: progress and updates.

作者信息

Lin Sophia, Lee Eugene K, Nguyen Nancy, Khine Michelle

机构信息

Department of Chemical Engineering and Materials Science, University of California, Irvine, Irvine, CA 92627, USA.

出版信息

Lab Chip. 2014 Sep 21;14(18):3475-88. doi: 10.1039/c4lc00528g. Epub 2014 Jul 30.

DOI:10.1039/c4lc00528g
PMID:25075652
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9061274/
Abstract

The field of micro- and nanofabrication has developed extensively in the past several decades with rising interest in alternative fabrication techniques. Growth of these areas has been driven by needs that remain unaddressed by traditional lithographical methods: inexpensive, upscalable, biocompatible, and easily integrated into complete lab-on-a-chip (LOC) systems. Shape memory polymers (SMPs) have been explored as an alternative substrate. This review first focuses on structure fabrication at the micron and nanoscale using specifically heat-shrinkable SMPs and highlights the innovative improvements to this technology in the past several years. The second part of the review illustrates demonstrated applications of these micro- and nanostructures fabricated from heat-shrinkable SMP films. The review concludes with a discussion about future prospects of heat-shrinkable SMP structures for integration into LOC systems.

摘要

在过去几十年中，随着对替代制造技术的兴趣不断增加，微纳制造领域得到了广泛发展。这些领域的发展是由传统光刻方法尚未解决的需求推动的：廉价、可扩大规模、生物相容性好且易于集成到完整的芯片实验室（LOC）系统中。形状记忆聚合物（SMP）已被探索作为一种替代基板。本综述首先关注使用特定的热收缩型SMP在微米和纳米尺度上进行结构制造，并强调过去几年该技术的创新改进。综述的第二部分阐述了由热收缩型SMP薄膜制造的这些微纳结构的已证明应用。综述最后讨论了热收缩型SMP结构集成到LOC系统中的未来前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/4442f2893a7a/nihms-617906-f0010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/1eb53884d847/nihms-617906-f0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/427973546e23/nihms-617906-f0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/d5b88aa39664/nihms-617906-f0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/db051b662cdd/nihms-617906-f0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/a98d0cc2fef8/nihms-617906-f0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/52c6971ae517/nihms-617906-f0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/1cd615926e99/nihms-617906-f0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/429ac52da096/nihms-617906-f0009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/4442f2893a7a/nihms-617906-f0010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/1eb53884d847/nihms-617906-f0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/427973546e23/nihms-617906-f0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/d5b88aa39664/nihms-617906-f0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/db051b662cdd/nihms-617906-f0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/a98d0cc2fef8/nihms-617906-f0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/52c6971ae517/nihms-617906-f0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/1cd615926e99/nihms-617906-f0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/429ac52da096/nihms-617906-f0009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c269/9061274/4442f2893a7a/nihms-617906-f0010.jpg

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