Hongjie Liu, Jin Huang, Fengrui Wang, Xinda Zhou, Xin Ye, Xiaoyan Zhou, Laixi Sun, Xiaodong Jiang, Zhan Sui, Wanguo Zheng
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.
Opt Express. 2013 May 20;21(10):12204-17. doi: 10.1364/OE.21.012204.
Many kinds of subsurface defects are always present together in the subsurface of fused silica optics. It is imperfect that only one kind of defects is isolated to investigate its impact on laser damage. Therefore it is necessary to investigate the impact of subsurface defects on laser induced damage of fused silica optics with a comprehensive vision. In this work, we choose the fused silica samples manufactured by different vendors to characterize subsurface defects and measure laser induced damage. Contamination defects, subsurface damage (SSD), optical-thermal absorption and hardness of fused silica surface are characterized with time-of-flight secondary ion mass spectrometry (TOF-SIMS), fluorescence microscopy, photo-thermal common-path interferometer and fully automatic micro-hardness tester respectively. Laser induced damage threshold and damage density are measured by 351 nm nanosecond pulse laser. The correlations existing between defects and laser induced damage are analyzed. The results show that Cerium element and SSD both have a good correlation with laser-induced damage thresholds and damage density. Research results evaluate process technology of fused silica optics in China at present. Furthermore, the results can provide technique support for improving laser induced damage performance of fused silica.
在熔融石英光学元件的亚表面总是同时存在多种亚表面缺陷。仅分离出一种缺陷来研究其对激光损伤的影响是不完美的。因此，有必要以全面的视角研究亚表面缺陷对熔融石英光学元件激光诱导损伤的影响。在这项工作中，我们选择不同供应商制造的熔融石英样品来表征亚表面缺陷并测量激光诱导损伤。分别使用飞行时间二次离子质谱仪（TOF-SIMS）、荧光显微镜、光热共光路干涉仪和全自动显微硬度测试仪来表征熔融石英表面的污染缺陷、亚表面损伤（SSD）、光热吸收和硬度。用351nm纳秒脉冲激光测量激光诱导损伤阈值和损伤密度。分析了缺陷与激光诱导损伤之间存在的相关性。结果表明，铈元素和亚表面损伤都与激光诱导损伤阈值和损伤密度有良好的相关性。研究结果评估了目前中国熔融石英光学元件的加工工艺。此外，这些结果可为提高熔融石英的激光诱导损伤性能提供技术支持。
