使用高对比度光栅进行二维波束形成和波束转向的光学相控阵。

Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering.

作者信息

Yoo Byung-Wook, Megens Mischa, Chan Trevor, Sun Tianbo, Yang Weijian, Chang-Hasnain Connie J, Horsley David A, Wu Ming C

机构信息

School of Electrical Engineering and Computer Sciences, University of California Berkeley, Berkeley, CA 94720, USA.

出版信息

Opt Express. 2013 May 20;21(10):12238-48. doi: 10.1364/OE.21.012238.

DOI:10.1364/OE.21.012238

PMID:23736444

Abstract

We have developed a microelectromechanical system (MEMS) optical phased array incorporating a high-index-contrast subwavelength grating (HCG) for beamforming and beamsteering in a range of ± 1.26° × 1.26°. Our approach needs only a thin single-layer HCG made of silicon, considerably improving its speed thanks to the low mass, and is suitable for high optical power applications. The measured resonant frequency of HCG is 0.32 MHz.

摘要

我们开发了一种微机电系统（MEMS）光学相控阵，其包含一个高折射率对比度亚波长光栅（HCG），用于在±1.26°×1.26°范围内进行波束形成和波束转向。我们的方法仅需一个由硅制成的薄单层HCG，由于质量低，其速度得到显著提高，并且适用于高光功率应用。测得的HCG谐振频率为0.32兆赫兹。