Richter Sören, Döring Sven, Burmeister Frank, Zimmermann Felix, Tünnermann Andreas, Nolte Stefan
Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany.
Opt Express. 2013 Jul 1;21(13):15452-63. doi: 10.1364/OE.21.015452.
The absorption and heat accumulation of successive ultrashort laser pulses in fused silica leads to melting of the material. We analyze the structure and formation of disruptions that occur within the trace of the molten material. We employed focused ion beam (FIB) milling to reveal the inner structure of these disruptions. The disruptions consist of several small voids which form a large cavity with a diameter of several tens of micrometer. Based on the observations, we suggest a model explaining the formation of these disruptions as a results of a fast quenching process of the molten material after the laser irradiation has stopped. In addition, we analyzed the periodic and non-periodic formation of disruptions. The processing parameters strongly influence the formation of disruptions.
连续超短激光脉冲在熔融石英中的吸收和热量积累会导致材料熔化。我们分析了在熔融材料痕迹内发生的破坏的结构和形成过程。我们采用聚焦离子束(FIB)铣削来揭示这些破坏的内部结构。这些破坏由几个小空洞组成,这些小空洞形成了一个直径为几十微米的大空腔。基于这些观察结果,我们提出了一个模型,解释这些破坏是激光辐照停止后熔融材料快速淬火过程的结果。此外,我们分析了破坏的周期性和非周期性形成。加工参数对破坏的形成有很大影响。