Böhme R, Vass C, Hopp B, Zimmer K
Leibniz-Institut für Oberflächenmodifizierung, Permoserstraße 15, 04318 Leipzig, Germany.
Nanotechnology. 2008 Dec 10;19(49):495301. doi: 10.1088/0957-4484/19/49/495301. Epub 2008 Nov 18.
Laser-induced backside wet etching (LIBWE) is performed using ultrashort 248 nm laser pulses with a pulse duration of 600 fs to obtain sub-wavelength laser-induced periodic surface structures (LIPSS) on the back surface of fused silica which is in contact with a 0.5 mol l(-1) solution of pyrene in toluene. The LIPSS are strictly one-dimensional patterns, oriented parallel to the polarization of the laser radiation, and have a constant period of about 140 nm at all applied laser fluences (0.33-0.84 J cm(-2)) and pulse numbers (50-1000 pulses). The LIPSS amplitude varies due to the inhomogeneous fluence in the laser spot. The LIPSS are examined with scanning electron microscopy (SEM) and atomic force microscopy (AFM). Their power spectral density (PSD) distribution is analysed at a measured area of 10 µm × 10 µm. The good agreement of the measured and calculated LIPSS periods strongly supports a mechanism based on the interference of surface-scattered and incident waves.
使用脉宽为600飞秒的超短248纳米激光脉冲进行激光诱导背面湿法蚀刻(LIBWE),以在与0.5摩尔/升芘的甲苯溶液接触的熔融石英背面上获得亚波长激光诱导周期性表面结构(LIPSS)。LIPSS是严格的一维图案,与激光辐射的偏振方向平行,并且在所有施加的激光能量密度(0.33 - 0.84焦/平方厘米)和脉冲数(50 - 1000个脉冲)下,周期恒定约为140纳米。由于激光光斑中能量密度不均匀,LIPSS的振幅会发生变化。通过扫描电子显微镜(SEM)和原子力显微镜(AFM)对LIPSS进行检测。在10微米×10微米的测量区域分析其功率谱密度(PSD)分布。测量和计算得到的LIPSS周期的良好一致性有力地支持了基于表面散射波和入射波干涉的机制。