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一种控制掠入射飞秒激光加工表面上激光诱导周期性表面结构形成的视角。

A Perspective to Control Laser-Induced Periodic Surface Structure Formation at Glancing-Incident Femtosecond Laser-Processed Surfaces.

作者信息

Jelinek Alexander, Pfeifenberger Manuel J, Pippan Reinhard, Kiener Daniel

机构信息

Department of Materials Science, Chair of Materials Physics, Montanuniversität Leoben, Franz-Josef-Straße 18, 8700 Leoben, Austria.

Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Jahnstraße 12, 8700 Leoben, Austria.

出版信息

JOM (1989). 2021;73(12):4248-4257. doi: 10.1007/s11837-021-04963-w. Epub 2021 Nov 1.

DOI:10.1007/s11837-021-04963-w
PMID:34970069
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8666433/
Abstract

UNLABELLED

The favorable combination of high material removal rate and low influence on the material beneath the ultra-short pulsed laser-processed surface are of particular advantage for sample preparation. This is especially true at the micrometer scale or for the pre-preparation for a subsequent focused ion beam milling process. Specific surface features, the laser-induced periodic surface structures, are generated on femtosecond laser-irradiated surfaces in most cases, which pose an issue for surface-sensitive mechanical testing or microstructural investigations. This work strives for an approach to enhance the surface quality of glancing-incident laser-processed surfaces on the model material copper with two distinctly different grain sizes. A new generalized perspective is presented, in which optimized parameter selection serves to counteract the formation of the laser-induced periodic surface structures, enabling, for example, grain orientation mapping directly on femtosecond laser processed surfaces.

SUPPLEMENTARY INFORMATION

The online version contains supplementary material available at 10.1007/s11837-021-04963-w.

摘要

未标注

超短脉冲激光加工表面具有高材料去除率和对其下方材料影响小的良好组合,这对于样品制备具有特别的优势。在微米尺度或后续聚焦离子束铣削工艺的预制备中尤其如此。在大多数情况下,飞秒激光辐照表面会产生特定的表面特征,即激光诱导的周期性表面结构,这给表面敏感的力学测试或微观结构研究带来了问题。这项工作致力于一种方法,以提高在具有两种截然不同晶粒尺寸的模型材料铜上掠入射激光加工表面的质量。提出了一种新的广义观点,其中优化参数选择有助于抵消激光诱导的周期性表面结构的形成,例如能够直接在飞秒激光加工表面上进行晶粒取向映射。

补充信息

在线版本包含可在10.1007/s11837-021-04963-w获取的补充材料。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/0d3bcdfcbe7f/11837_2021_4963_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/1a316f6f94d3/11837_2021_4963_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/ff5f7bfc3bc8/11837_2021_4963_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/f6fab4e35bd2/11837_2021_4963_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/7902b3ec3f6e/11837_2021_4963_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/0d3bcdfcbe7f/11837_2021_4963_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/1a316f6f94d3/11837_2021_4963_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/ff5f7bfc3bc8/11837_2021_4963_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/f6fab4e35bd2/11837_2021_4963_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/7902b3ec3f6e/11837_2021_4963_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/01cb/8666433/0d3bcdfcbe7f/11837_2021_4963_Fig5_HTML.jpg

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本文引用的文献

1
The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber.激光聚焦离子束系统:在集成的第二腔室中将高性能聚焦离子束扫描电子显微镜与飞秒激光加工相结合的新应用机遇。
Appl Microsc. 2020 Oct 26;50(1):24. doi: 10.1186/s42649-020-00044-5.
2
Micro/nanostructures formation by femtosecond laser surface processing on amorphous and polycrystalline NiNb.飞秒激光表面处理在非晶态和多晶态镍铌上形成微/纳米结构。
Appl Surf Sci. 2017 Feb 28;396:1170-1176. doi: 10.1016/j.apsusc.2016.11.107. Epub 2016 Nov 15.
3
TEM sample preparation by femtosecond laser machining and ion milling for high-rate TEM straining experiments.
用于高速率透射电子显微镜(TEM)应变实验的飞秒激光加工和离子铣削制备TEM样品。
Ultramicroscopy. 2017 Apr;175:1-8. doi: 10.1016/j.ultramic.2016.12.001. Epub 2016 Dec 5.
4
Laser induced breakdown spectroscopy based on single beam splitting and geometric configuration for effective signal enhancement.基于单光束分光和几何结构的激光诱导击穿光谱技术用于有效信号增强。
Sci Rep. 2015 Jan 5;5:7625. doi: 10.1038/srep07625.
5
Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser.激光诱导近亚波长波纹的起源:表面等离激元和入射激光之间的干涉。
ACS Nano. 2009 Dec 22;3(12):4062-70. doi: 10.1021/nn900654v.